DNP in 2001 commenced MEMS prototype services, using the ultra micro processing technology and silicon deep etching technology developed in the manufacture of high precision photo masks for semiconductors. The company successfully completed an MEMS dedicated mass production development line compatible with 6” and 8” wafers at Kashiwa city in Chiba Prefecture and now provides a total through service from planning and prototypes to mass production. DNP is in the unique position of being the only company in Japan maintaining an MEMS service, but not producing in-house products, and aims to exploit this neutral position as a strength in promoting the MEMS business.
The newly developed micro channel chip is a form of bio-MEMS, which is in the public spotlight as a research tool in such areas as bio, medicine and drug discovery.
DNP jointly developed the micro channel chip based on the inorganic materials silicon and glass, along with the research group of Associate Professor Shoji Takeuchi of the University of Tokyo in 2007. Experiments have since been conducted under a variety of conditions, and at the same time as confirming the performance and range of application of the micro channel chip, work has also been carried out on designing and developing chips with new functions.
DNP has now enhanced its lineup by designing and developing a total of four micro channel chips, including a chip which makes it possible to extract up to 10,000 micro-particles trapped in the cavities of a single 8” wafer on a particle by particle basis or in their entirety, a chip capable of forming uniform micro meter size emulsion droplets, and a chip which can generate micro-droplets and extract them on an individual basis. It is possible to apply these developments in the functional analysis of cells and protein, along with the development and manufacture of prescription pharmaceuticals.
By employing localized anti-pollution technology used in semiconductor manufacture in chip production, it has been possible to achieve high yield chip production even with large size chips. As a result, it has become possible to provide chips at lower prices than before.