Bridget Klebaur 10.10.13
AIXTRON SE announced that China’s National Center for Nanoscience and Technology (NCNST) has ordered AIXTRON’s BM R&D system for the growth of carbon-based structures such as nanotubes and graphene on 2-inch substrates. The system will be supported by AIXTRON’s local Chinese office.
“Our research currently focuses on the characterization of carbon nanotubes (CNT) and on plasmonic properties of graphene,” said Dr. Qing Dai of NCNST. “Our goal is to build nanophotonic devices such as terahertz waveguides. We will also utilize the system for growing 3D nanostructures combining CNT and graphene which both possess the potential for active controlled plasmonic devices.”
AIXTRON’s BM system features high performance heating with ramping rates of up to 1000°C/minute, and can operate in both thermal and plasma-enhanced chemical vapor deposition modes. Equipped with automatic process control this ensures that reproducible, high quality films are consistently deposited.
“Uniform films are especially important for the coupling and propagating of surface plasmons, and process repeatability is crucial in building these devices,” Dr. Dai added. “Having used the BM system myself, I am completely confident that the AIXTRON tool will meet our requirements for producing CNT and graphene films.”