07.11.22
Designed to be integrated within demanding coating systems, Sensirion's SLQ-QT105 flow sensor is a semiconductor-grade-sensor solution for liquid flow rates of up to 120 ml/min of hydrocarbon-based liquids like photoresists and solvents.
Based on Sensirion’s thermal microsensor technology, it breaks new ground when it comes to crucial metrics such as sensitivity, reliability and speed. The short response time of the SLQ-QT105 enables accurate monitoring of highly dynamic processes such as fast dosing operations.
Equipped with fittings for 4 x 3 mm PFA tubing, it works without any moving parts, and can non-invasively measure through the wall of a straight flow path. A smart digital interface and robust RS485 communication are offered for long distance and bus capability.
Based on Sensirion’s thermal microsensor technology, it breaks new ground when it comes to crucial metrics such as sensitivity, reliability and speed. The short response time of the SLQ-QT105 enables accurate monitoring of highly dynamic processes such as fast dosing operations.
Equipped with fittings for 4 x 3 mm PFA tubing, it works without any moving parts, and can non-invasively measure through the wall of a straight flow path. A smart digital interface and robust RS485 communication are offered for long distance and bus capability.