This partnership leverages Brewer Science’s strength of more than 30 years’ experience in advanced semiconductor materials and process solutions with Arkema’s experience of more than 20 years in block copolymer (BCP) technology. This combination will accelerate the introduction of DSA material technology for next generation lithography applications.
“Our goal is to provide a turnkey DSA process so customers can obtain all the materials and process knowledge needed to implement DSA quickly and cost effectively,“ said Dr. Daniel Sullivan, director of Brewer Science’s Semiconductor R&D. “Combining each company’s expertise in materials and manufacturing will allow us to deliver a robust solution to the industry.”
Both companies plan to bring process stability to DSA by providing BCP in volume to support an entire node life with a single batch while also offering a wide range of process flexibility through a full suite of DSA flow materials and Arkema’s BCP blending process.