Paul van der Heide, Director of the MCA department & Co-AttoLab Principal at imec03.24.21
The emergence of new materials to support semiconductor device scaling drives new characterization needs.
Table-top high harmonic generation (HHG) sources feeding advanced imaging and spectroscopy techniques complementing those found at synchrotron sites are being examined as a potential source to fill these needs.
This is the beating heart of the AttoLab, a game-changing, multifunctional characterization facility initiated by imec in collaboration with KMLabs and SPECS.
Materials characterization/metrology are key enablers in the semiconductor industry as they not only support fundamental R&D but also provide a means to ensure that high volume manufacturing (HVM) is proceeding as spec’d. And with Moore’s law continuing its relentless path forward (3nm logic process flows are expected to go into production mid-2022/early 2023 with 2nm due shortly thereafter), the question is: how small can we go?
One of the barriers to
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