Glossary

MEMS (Electronic)

11.12.08

Micro-ElectroMechanical Systems. Microelectromechanical systems (MEMS) is the technology of the very small, and merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology . MEMS are also referred to as micromachines (in Japan), or Micro Systems Technology - MST (in Europe).

One of the basic building blocks in MEMS processing is the ability to deposit thin films of material. In this text we assume a thin film to have a thickness anywhere between a few nanometers to about 100 micrometers. Commonly used deposition processes are: Electroplating, Sputter deposition, Physical Vapour Deposition (PVD) and Chemical Vapour Deposition (CVD).

Source: Wikipedia
URL: http://en.wikipedia.org/wiki/MEMS